单晶硅纳米力学性能的测试(6)

单晶硅纳米力学性能的测试

第7期

　　　　　　　　赵宏伟,等:单晶硅纳米力学性能的测试

1607

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作者简介

:

　赵宏伟(1976-),男,吉林九台人,工学博士,主要从事微纳驱动控制技术、超精密加工、微纳米力学测试等方面的研究。E2mail:zhaohongwei_jlu@yahoo.

com

杨柏豪(1976-),男,河南人,工学硕士,主要从事力学测试与精密检测技术的研究。E-mail:yangbaihao@sina.

com