XPS结合能峰位峰宽等参考数据周期表

XPS分析非常有用的数据图表,它和元素周期表有机结合起来,非常方便平常分析数据查找

11H 2°

H 1sLiH

Fundamental XPS Data from Pure Elements, Pure Oxides, and Chemical Compounds2 13Atomic Number of Element

C(1s) BE= 285.0 eV Charge Referencing182 He 1sHe+/Be He+/C

146HOPG 284.5 (0.42)

157400.9 (1.31) 285.0

168CuO529.7 (0.98) 284.9 934.0 (1.42)

179688.9 (1.8) 285.0 291.9 (1.6)

3Li°

Li 1sLiOH54.9 (1.65) 285.0 531.8 (1.6)

4Be°

Be 1sBeO113.6 (1.73) 285.0 531.3 (1.47) Abbreviation for Element Al (2p3) BE of Al° under Native Oxide Al (2p3) FWHM of Al° under Native Oxide C (1s) BE of Hydrocarbons Captured by Ion Etched Al° Reliable Reference BE for Ion Etched, Pure Al° Al (2p3) FWHM of Ion Etched, Pure Al°

13Al°72.9 (0.62) 284.7 72.82 (0.41)

Al 2p3Al2O374.3 (1.41) 285.0 531.1 (1.56)

Main XPS Signal for Element of Interest Most Common Oxide or Chemical Compound of Element Al (2p3) BE of Major Oxide Species in Pure Oxide Al (2p3) FWHM of Major Oxide Species in Pure Oxide C (1s) BE Defined to be at 285.0 eV O (1s) BE of Major Oxygen Species in Pure Oxide O (1s) FWHM of Major Oxygen Species in Pure Oxide The FWHM and BE values presented in this table were all obtained by one scientist using two SSI XPS systems, which yield a theoretical energy resolution limit of about 0.1 eV and were equipped with monochromatic Aluminum X-ray sources which have a theoretical energy resolution limit of about 0.16 eV. The BEs for the ion etched elements can be used as reliable secondary energy reference values within a standard deviation of 0.055. All other BE values are<±0.15 eV.

5B°187.5 (0.87) 285.2 187.8 (1.03)

B 1sB2O3194.0 (2.40) 285.0 532.5 (2.22)

C 1sBlack 284.4 (1.04)

N 1s398.9 (1.10) 285.0 191.3 (1.03)

O 1s532.5 (1.40) 285.0 103.0 (1.14)

F 1s685.1 (1.53) 285.0 348.1 (1.6)

10 Ne 1sNe+/Be Ne+/C

Kapton BN

SiO2 Teflon CaF2

111.9 (0.79) 286.1 111.88 (0.69)

11 Na 1sNa° NaCl1072.0 (1.40) 285.0 199.3 (1.19)

12 Mg 2pMg°49.7 (0.58) 286.5 49.77 (0.60)

MgO51.5 (1.63) 285.0 529.8 (1.99)

All non-conductive materials were referenced to adventitious hydrocarbon with C (1s) BE at 285.0eV. Energy resolution settings for pure oxide data gave FWHM<0.75 eV for Ag (3d5) of ion etched Ag°. All non-conductors were analyzed with the Flood-Gun Mesh-Screen 0.5-1.0 mm above the specimen. C (1s) BEs for"hydrocarbons" on elements were collected from carbon captured by ion etched elements. Carbon from the cryo-pumped vacuum (3x10(-9) torr) was analyzed>10 hours after ion etching. Energy resolution settings for ion etched elements gave FWHM<0.50 eV forAg (3d5) of ion etched Ag°. Calibration was: Cu (2p3) at 932.67±0.05 eV, Cu (3s) at 122.45±0.05 eV, and Au(4f7) at 83.98 eV.

13 Al 2p3Al°72.9 (0.62) 284.7 72.82 (0.41)

14 Si 2p3Si°99.8 (0.57) 285.3 99.35 (0.45)

15 P 2p3P° InP130.13 128.8 (0.67) (0.62) 285.0 285.0 444.7 (0.78)

16 S 2p3S°164.0 (0.72) 285.0

17 Cl 2p3PVC199.8 (1.7) 285.0

18 Ar 2p3Ar+/Be Ar+/C242.1 (0.90) 285.0

Al2O375.6 (1.41) 285.0 531.1 (1.56)

SiO210

3.0 (1.14) 285.0 532.5 (1.40)

MoS2162.7 (0.39) 229.7 (0.80)

NaCl199.3 (1.19) 285.0 1072.0 (1.40)

321 Sc 2p3Sc° Sc2O3398.6 (0.9) 285.8 398.46 (0.69) 401.9 (1.27) 285.0 530.0 (1.33)

422 Ti 2p3Ti°453.8 (0.90) 285.2 453.95 (0.62)

523 V 2p3V°512.2 (0.79) 285.0 512.22 (0.75)

624 Cr 2p3Cr° Cr2O3574.2 (1.05) 284.6 574.37 (0.89) 575.7 (1.20) 285.0 530.1 (1.24)

725 Mn 2p3Mn°638.7 (1.00) 286.4 638.74 (0.89)

826 Fe 2p3Fe°706.6 (0.90) 284.9 706.78 (0.99)

927 Co 2p3Co° Co3O4778.1 (0.99) 284.9 778.26 (0.85) 779.5 (1.39) 285.0 530.1 (1.00)

1028 Ni 2p3Ni°852.6 (1.14) 284.8 852.65 (1.02)

11Cu° Cu2O932.7 (1.22) 284.6 932.68 (0.92) 932.5 (1.10) 285.0 530.5 (1.01)

12Zn°1021.8 (1.10) 284.8 1021.76 (0.97)

19 K 2p3K° KI293.2 (1.11) 285.0 619.2 (1.30)

20 Ca 2p3Ca°346.5 (?) 284.6 346.5 (1.07)

29 Cu 2p3 30 Zn 2p3ZnO1021.7 (1.50) 285.0 530.5 (1.11)

31 Ga 3d5Ga°18.7 (0.70) 285.0 18.5 (0.60)

32 Ge 3d5Ge°29.3 (0.68) 285.0 29.28 (0.64)

33 As 3d5As° As2O341.8 (0.67) 284.5 41.69 (0.67) 45.1 (1.26) 285.0 532.0 (1.41)

34 Se 3d5Se° SeOx54.8 (0.76) 284.2 54.90 (0.78) 59.3 (1.09) 285.0 532.6

35 Br 3d5KBr68.8 (0.92) 285.0 293.0 (1.31)

36 Kr 3d5Kr+/Be Kr+/C86.94 (0.79) 285.0

CaO347.1 (1.81) 285.0 531.5 (1.57)

TiO2458.7 (1.09) 285.0 530.0 (1.18)

V2O5517.3 (1.32) 285.0 530.2 (1.33)

MnO2641.5 (1.12) 285.0 529.5 (1.02)

Fe2O3709.8 (1.32) 285.0 532.9 (1.05)

NiO853.8 (1.42) 285.0 529.4 (1.03)

Ga2O320.7 (1.37) 285.0 531.3 (1.51)

GeO233.2 (1.49) 285.0 532.2 (1.40)

37 Rb 3d5Rb° RbOAc109.7 (1.40) 285.0 530.9 (1.6)

38 Sr 3d5Sr° SrCO3133.7 (1.63) 285.0 531.5 (1.9)

39 Y 3d5Y°155.9 (0.80) 286.0 155.92 (0.62)

40 Zr 3d5Zr°179.0 (0.90) 285.3 178.80 (0.63)

41 Nb 3d5Nb° Nb2O5202.1 (0.78) 285.0 202.35 (0.57) 207.4 (1.14) 285.0 530.4 (1.36)

42 Mo 3d5Mo°227.8 (0.66) 285.4 227.94 (0.57)

43 Tc 3d5Tc°e tiv ac dio a R

44 Ru 3d5Ru°280.0 (0.67) --280.11 (0.59)

45 Rh 3d5 46 Pd 3d5Rh°307.2 (0.73) 284.05 307.21 (0.69)

47 Ag 3d5Ag°368.2 (0.64) 284.7 368.28 (0.62)

48 Cd 3d5Cd°405.0 (0.90) 285.0 405.04 (0.61)

49 In 3d5In°443.8 (1.08) 284.9 443.87 (0.71)

50 Sn 3d5Sn°484.9 (0.81) 284.7 485.01 (0.68)

51 Sb 3d5Sb°528.2 (1.0) 284.6 528.26 (0.80)

52 Te 3d5Te°572.8 (1.12) 284.2 572.97 (0.83)

53 I 3d5KI619.2 (1.30) 285.0 293.2 (1.11)

54 Xe 3d5Xe+/Be Xe+/C669.6 (1.13) 285.0

Y2O3156.6 (1.25) 285.0 531.0 (1.30)

ZrO2182.4 (1.18) 285.0 530.3 (1.39)

MoO3233.1 (1.05) 285.0 531.0 (1.20)

RuO2281.1 (0.79) 285.0 529.7 (0.95)

Rh2O3308.9 (0.80) 285.0 530.5 (1.05)

Pd°335.1 (0.86) 284.5 335.10 (0.77)

PdO337.0 (0.97) 285.0 530.7 (1.35)

Ag2O367.5 (1.00) 285.0 529.4 (0.97)

CdO404.0 (1.38) 285.0 528.6 (1.28)

In2O3444.3 (1.26) 285.0 529.9 (1.19)

SnO2487.3 (1.28) 285.0 531.1 (1.29)

Sb2O5530.4 (1.10) 285.0 531.2 (0.86)

TeO2576.5 (1.27) 285.0 530.7 (1.39)

55 Cs 3d5Cs° CsCl724.6 (2.08) 285.0 199.2

56 Ba 3d5Ba° BaOAc780.0 (1.80) 285.0 531.4 (1.83)

57 La

3d5La° La2O3834.7 (3.0) 285.0 529.2 (1.6)

72 Hf 4f7Hf° HfO214.4 (0.63) 285.7 14.32 (0.62) 17.1 (1.26) 285.0 530.5 (1.68)

73 Ta 4f7Ta°21.8 (0.80) 285.0 21.78 (0.56)

74 W 4f7W°31.4 (0.58) 285.3 31.38 (0.53)

75 Re 4f7Re° Re2O740.3 (0.67) 285.3 40.30 (0.54) 46.8 (1.64) 285.0 532.1 (1.58)

76 Os 4f7Os° OsO4

77 Ir 4f7Ir°60.8 (0.80) 284.4 60.88 (0.82)

78 Pt 4f7Pt°71.0 (0.96) 284.3 71.15 (0.88)

79 Au 4f7Au°84.1 (0.83) 284.1 83.98 (0.68)

80 Hg 4f7Hg°99.8 --285.0 99.81 (0.65)

81 Tl 4f7Tl°117.8 (0.97) 285.1 117.77 (0.66)

82 Pb 4f7Pb°136.9 (0.67) 284.9 136.95 (0.63)

83 Bi 4f7Bi°157.0 (0.73) 284.6 157.05 (0.62)

84 Po 4f7

85 At 4f7

86 Rn 4f7

Ta2O526.8 (1.12) 285.0 531.0 (1.46)

WO335.8 (1.01) 285.0 530.6 (1.27)

IrO262.0 (0.98) 285.0 530.2 (0.97)

PtO275.1 (1.16) 285.0 531.3 (1.74)

Au2O388.1 (1.12) 285.0 531.6 (1.13)

HgO100.7 (1.06) (285.0) 532.9 (0.96)

Tl2O3118.2 (1.01) 285.0 528.8 (1.10)

PbO137.5 (1.10) 285.0 528.9 (1.07)

Bi2O3158.8 (1.11) 285.0 529.6 (1.58)e tiv ac dio a R e tiv ac dio a R ve cti ioa d Ra

87 Fr 4f7

88 Ra 4f7

89 Ac 4f7

Copyrights© 1999 XPS International Inc.58 Ce 3d5Ce° CeO2882.1 (2.0) 285.0 529.6 (2.00)

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B. Vincent Crist Last Update 2-22-99

59 Pr 3d5Pr° Pr2O5(931.98) 933.1 --(4.4) --285.0 111.2 528.2 (2.17) (1.4)

60 Nd 3d5Nd° Nd2O3(980.86) ----118.0 (1.80)

61 Pm 4d5 62 Sm 4d5Pm° Pm2O3 Sm° Sm2O3e tiv ac dio a R

63 Eu 4d5Eu° Eu2O3128.2 --284.3 128.18 (1.08) 135.6 (3.7) 285.0 529.2 (1.4)

64 Gd 4d5Gd° Gd2O3140.2 (1186.8) (5.4) --281.4 285.0 140.33 529.0 (1.02) (1.7)

65 Tb 4d5Tb° Tb3O7145.9 ----146.02 (1.33) (149.9) (?) 285.0 529.5 (1.6)

66 Dy 4d5Dy° Dy2O3152.4 (156.1) (?) --285.0 --152.30 529.2 (1.7) (1.88)

67 Ho 4d5 68 Er 4d5Ho°159.8 ----159.58 (1.50)

69 Tm 4d5Tm°175.3 --285.3 175.37 (1.92) 176.3 (3.4) 285.0 529.6 (1.7)

70 Yb 4f7Yb2O3184.9 (3.4) 285.0 529.4 (2.0) 1.07 --285.6 (182.39) (0.61)

71 Lu 4f7Lu°7.10 --284.6 7.1 (0.69)

Ho2O3161.3 ((6.0) 285.0 529.3 (1.7)

Er°167.7 ----167.25 (1.93)

Er2O3168.5 (3.8) 285.0 529.2 (1.9)

Tm2O3 Yb°

Lu2O38.4 (3.0) 285.0 529.6 (1.8)

(134.9) --(10) --285.0 --123.2 531.7 (2.5?) (2.4)

90 Th 4f7Th° ThO2

91 Pa 4f7

92 U 4f7U° U2O3

93

Np

94

Pu

95

Am

96

Cm

97

Bk

98

Cf

99

Es

100

Fm

101

Md

102

No

103

Lr

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